Removing a sheet from the surface of a melt using gas jets
Patent
·
OSTI ID:1129068
In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.
- Research Organization:
- Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0000595
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- Patent Number(s):
- 8,685,162
- Application Number:
- 13/037,789
- OSTI ID:
- 1129068
- Country of Publication:
- United States
- Language:
- English
Investigation of the meniscus stability in horizontal crystal ribbon growth
|
journal | September 1980 |
Improvements in the Horizontal Ribbon Growth technique for single crystal silicon
|
journal | September 1980 |
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