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Title: Transparent conducting oxides and production thereof

Abstract

Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.

Inventors:
; ;
Publication Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1133958
Patent Number(s):
8,747,630
Application Number:
12/130,788
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO) NREL
DOE Contract Number:  
AC36-99GO10337
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Gessert, Timothy A., Yoshida, Yuki, and Coutts, Timothy J. Transparent conducting oxides and production thereof. United States: N. p., 2014. Web.
Gessert, Timothy A., Yoshida, Yuki, & Coutts, Timothy J. Transparent conducting oxides and production thereof. United States.
Gessert, Timothy A., Yoshida, Yuki, and Coutts, Timothy J. Tue . "Transparent conducting oxides and production thereof". United States. doi:. https://www.osti.gov/servlets/purl/1133958.
@article{osti_1133958,
title = {Transparent conducting oxides and production thereof},
author = {Gessert, Timothy A. and Yoshida, Yuki and Coutts, Timothy J.},
abstractNote = {Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 10 00:00:00 EDT 2014},
month = {Tue Jun 10 00:00:00 EDT 2014}
}

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