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Title: Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof

Abstract

Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.

Inventors:
 [1];  [2];  [3];  [4];  [5];  [5];  [6];  [5]
  1. (Boulder, CO)
  2. (Lakewood, CO)
  3. (Evergreen, CO)
  4. (Golden, CO)
  5. (Holland, MI)
  6. (Hudsonville, MI)
Publication Date:
Research Org.:
Alliance for Sustainable Energy, LLC (Golden, CO)
Sponsoring Org.:
USDOE
OSTI Identifier:
1013008
Patent Number(s):
7,754,352
Application Number:
11/738,344
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO) GFO
DOE Contract Number:  
AC36-99GO10337
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A., Luten, Henry A., Forgette, Jeffrey A., and Anderson, John S. Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof. United States: N. p., 2010. Web.
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A., Luten, Henry A., Forgette, Jeffrey A., & Anderson, John S. Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof. United States.
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A., Luten, Henry A., Forgette, Jeffrey A., and Anderson, John S. Tue . "Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof". United States. doi:. https://www.osti.gov/servlets/purl/1013008.
@article{osti_1013008,
title = {Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof},
author = {Perkins, John and Van Hest, Marinus Franciscus Antonius Maria and Ginley, David and Taylor, Matthew and Neuman, George A. and Luten, Henry A. and Forgette, Jeffrey A. and Anderson, John S.},
abstractNote = {Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 13 00:00:00 EDT 2010},
month = {Tue Jul 13 00:00:00 EDT 2010}
}

Patent:

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