Direct chemical vapor deposition of graphene on dielectric surfaces

Zhang, Yuegang; Ismach, Ariel

Direct chemical vapor deposition of graphene on dielectric surfaces

Patent · 29 April 2014

OSTI ID:1130059

Zhang, Yuegang; Ismach, Ariel

A substrate is provided that has a metallic layer on a substrate surface of a substrate. A film made of a two dimensional (2-D) material, such as graphene, is deposited on a metallic surface of the metallic layer. The metallic layer is dewet and/or removed to provide the film on the substrate surface.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-05CH11231

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Number(s):: 8,709,881

Application Number:: 13/098,929

OSTI ID:: 1130059

Country of Publication:: United States

Language:: English

References (50)

Raman Spectroscopy of Graphene Edges Casiraghi, C.; Hartschuh, A.; Qian, H. Nano Letters, Vol. 9, Issue 4 https://doi.org/10.1021/nl8032697	journal	April 2009
Transfer-Free Batch Fabrication of Single Layer Graphene Transistors Levendorf, Mark P.; Ruiz-Vargas, Carlos S.; Garg, Shivank Nano Letters, Vol. 9, Issue 12 https://doi.org/10.1021/nl902790r	journal	December 2009
Processable aqueous dispersions of graphene nanosheets Li, Dan; Müller, Marc B.; Gilje, Scott Nature Nanotechnology, Vol. 3, Issue 2 https://doi.org/10.1038/nnano.2007.451	journal	January 2008
Raman fingerprint of charged impurities in graphene Casiraghi, C.; Pisana, S.; Novoselov, K. S. Applied Physics Letters, Vol. 91, Issue 23 https://doi.org/10.1063/1.2818692	journal	December 2007
The rise of graphene Geim, A. K.; Novoselov, K. S. Nature Materials, Vol. 6, Issue 3, p. 183-191 https://doi.org/10.1038/nmat1849	journal	March 2007
Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide Emtsev, Konstantin V.; Bostwick, Aaron; Horn, Karsten Nature Materials, Vol. 8, Issue 3 https://doi.org/10.1038/nmat2382	journal	February 2009
Few-layer graphene on SiC, pyrolitic graphite, and graphene: A Raman scattering study Faugeras, C.; Nerrière, A.; Potemski, M. Applied Physics Letters, Vol. 92, Issue 1 https://doi.org/10.1063/1.2828975	journal	January 2008
Midgap states and charge inhomogeneities in corrugated graphene Guinea, F.; Katsnelson, M. I.; Vozmediano, M. A. H. Physical Review B, Vol. 77, Issue 7 https://doi.org/10.1103/PhysRevB.77.075422	journal	February 2008
Raman Spectra of Epitaxial Graphene on SiC and of Epitaxial Graphene Transferred to SiO ₂ Lee, Dong Su; Riedl, Christian; Krauss, Benjamin Nano Letters, Vol. 8, Issue 12 https://doi.org/10.1021/nl802156w	journal	December 2008
Measuring the degree of stacking order in graphite by Raman spectroscopy Cançado, L. G.; Takai, K.; Enoki, T. Carbon, Vol. 46, Issue 2, p. 272-275 https://doi.org/10.1016/j.carbon.2007.11.015	journal	February 2008
Scanning Tunneling Microscopy Characterization of the Electrical Properties of Wrinkles in Exfoliated Graphene Monolayers Xu, Ke; Cao, Peigen; Heath, James R. Nano Letters, Vol. 9, Issue 12 https://doi.org/10.1021/nl902729p	journal	December 2009
Preparation and characterization of graphene oxide paper Dikin, Dmitriy A.; Stankovich, Sasha; Zimney, Eric J. Nature, Vol. 448, Issue 7152, p. 457-460 https://doi.org/10.1038/nature06016	journal	July 2007
Room-Temperature Quantum Hall Effect in Graphene Novoselov, K. S.; Jiang, Z.; Zhang, Y. Science, Vol. 315, Issue 5817 https://doi.org/10.1126/science.1137201	journal	March 2007
Ultrathin Epitaxial Graphite: 2D Electron Gas Properties and a Route toward Graphene-based Nanoelectronics Berger, Claire; Song, Zhimin; Li, Tianbo The Journal of Physical Chemistry B, Vol. 108, Issue 52, p. 19912-19916 https://doi.org/10.1021/jp040650f	journal	December 2004
Raman Spectrum of Graphite Tuinstra, F.; Koenig, J. L. The Journal of Chemical Physics, Vol. 53, Issue 3 https://doi.org/10.1063/1.1674108	journal	August 1970
Raman spectra of misoriented bilayer graphene Poncharal, P.; Ayari, A.; Michel, T. Physical Review B, Vol. 78, Issue 11 https://doi.org/10.1103/PhysRevB.78.113407	journal	September 2008
Why Multilayer Graphene on 4 H − SiC ( 000 1 ¯ ) Behaves Like a Single Sheet of Graphene Hass, J.; Varchon, F.; Millán-Otoya, J. E. Physical Review Letters, Vol. 100, Issue 12 https://doi.org/10.1103/PhysRevLett.100.125504	journal	March 2008
Enhancement of Chemical Activity in Corrugated Graphene Boukhvalov, Danil W.; Katsnelson, Mikhail I. The Journal of Physical Chemistry C, Vol. 113, Issue 32 https://doi.org/10.1021/jp905702e	journal	July 2009
Chemically Derived, Ultrasmooth Graphene Nanoribbon Semiconductors Li, Xiaolin; Wang, Xinran; Zhang, Li Science, Vol. 319, Issue 5867, p. 1229-1232 https://doi.org/10.1126/science.1150878	journal	February 2008
Perspectives on Carbon Nanotubes and Graphene Raman Spectroscopy Dresselhaus, Mildred S.; Jorio, Ado; Hofmann, Mario Nano Letters, Vol. 10, Issue 3 https://doi.org/10.1021/nl904286r	journal	March 2010
Raman Spectrum of Graphene and Graphene Layers Ferrari, A. C.; Meyer, J. C.; Scardaci, V. Physical Review Letters, Vol. 97, Issue 18, Article No. 187401 https://doi.org/10.1103/PhysRevLett.97.187401	journal	October 2006
Raman spectroscopy in graphene Malard, L. M.; Pimenta, M. A.; Dresselhaus, G. Physics Reports, Vol. 473, Issue 5-6, p. 51-87 https://doi.org/10.1016/j.physrep.2009.02.003	journal	April 2009
Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils Li, X.; Cai, W.; An, J. Science, Vol. 324, Issue 5932, p. 1312-1314 https://doi.org/10.1126/science.1171245	journal	May 2009
Graphene-based composite materials Stankovich, Sasha; Dikin, Dmitriy A.; Dommett, Geoffrey H. B. Nature, Vol. 442, Issue 7100, p. 282-286 https://doi.org/10.1038/nature04969	journal	July 2006
Interpretation of Raman spectra of disordered and amorphous carbon Ferrari, A. C.; Robertson, J. Physical Review B, Vol. 61, Issue 20, p. 14095-14107 https://doi.org/10.1103/PhysRevB.61.14095	journal	May 2000
Experimental observation of the quantum Hall effect and Berry's phase in graphene Zhang, Yuanbo; Tan, Yan-Wen; Stormer, Horst L. Nature, Vol. 438, Issue 7065, p. 201-204 https://doi.org/10.1038/nature04235	journal	November 2005
Detection of individual gas molecules adsorbed on graphene Schedin, F.; Geim, A. K.; Morozov, S. V. Nature Materials, Vol. 6, Issue 9, p. 652-655 https://doi.org/10.1038/nmat1967	journal	July 2007
Electron-electron interactions and doping dependence of the two-phonon Raman intensity in graphene Basko, D. M.; Piscanec, S.; Ferrari, A. C. Physical Review B, Vol. 80, Issue 16 https://doi.org/10.1103/PhysRevB.80.165413	journal	October 2009
Intercalation of silver atoms under a graphite monolayer on Ni(111) Starodubov, A. G.; Medvetskii, M. A.; Shikin, A. M. Physics of the Solid State, Vol. 46, Issue 7 https://doi.org/10.1134/1.1778462	journal	July 2004
Electric Field Effect in Atomically Thin Carbon Films Novoselov, K. S. Science, Vol. 306, Issue 5696, p. 666-669 https://doi.org/10.1126/science.1102896	journal	October 2004
High-yield production of graphene by liquid-phase exfoliation of graphite Hernandez, Yenny; Nicolosi, Valeria; Lotya, Mustafa Nature Nanotechnology, Vol. 3, Issue 9, p. 563-568 https://doi.org/10.1038/nnano.2008.215	journal	August 2008
Control of Graphene's Properties by Reversible Hydrogenation: Evidence for Graphane Elias, D. C.; Nair, R. R.; Mohiuddin, T. M. G. Science, Vol. 323, Issue 5914 https://doi.org/10.1126/science.1167130	journal	January 2009
Anisotropic behaviours of massless Dirac fermions in graphene under periodic potentials Park, Cheol-Hwan; Yang, Li; Son, Young-Woo Nature Physics, Vol. 4, Issue 3 https://doi.org/10.1038/nphys890	journal	February 2008
Growth of graphene on Ir(111) T. N'Diaye, Alpha; Engler, Martin; Busse, Carsten New Journal of Physics, Vol. 11, Issue 2 https://doi.org/10.1088/1367-2630/11/2/023006	journal	February 2009
Direct Chemical Vapor Deposition of Graphene on Dielectric Surfaces Ismach, Ariel; Druzgalski, Clara; Penwell, Samuel Nano Letters, Vol. 10, Issue 5 https://doi.org/10.1021/nl9037714	journal	May 2010
Minimal conductivity of rippled graphene with topological disorder Cortijo, Alberto; Vozmediano, María A. H. Physical Review B, Vol. 79, Issue 18 https://doi.org/10.1103/PhysRevB.79.184205	journal	May 2009
Origin of dispersive effects of the Raman D band in carbon materials Matthews, M. J.; Pimenta, M. A.; Dresselhaus, G. Physical Review B, Vol. 59, Issue 10 https://doi.org/10.1103/PhysRevB.59.R6585	journal	March 1999
Monitoring dopants by Raman scattering in an electrochemically top-gated graphene transistor Das, A.; Pisana, S.; Chakraborty, B. Nature Nanotechnology, Vol. 3, Issue 4 https://doi.org/10.1038/nnano.2008.67	journal	March 2008
Uniaxial strain in graphene by Raman spectroscopy: G peak splitting, Grüneisen parameters, and sample orientation Mohiuddin, T. M. G.; Lombardo, A.; Nair, R. R. Physical Review B, Vol. 79, Issue 20 https://doi.org/10.1103/PhysRevB.79.205433	journal	May 2009
Synthesis of Graphene on Silicon Dioxide by a Solid Carbon Source Hofrichter, Jens; Szafranek, Bartholomäus N.; Otto, Martin Nano Letters, Vol. 10, Issue 1 https://doi.org/10.1021/nl902558x	journal	January 2010
Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition Reina, Alfonso; Jia, Xiaoting; Ho, John Nano Letters, Vol. 9, Issue 1 https://doi.org/10.1021/nl801827v	journal	January 2009
High-throughput solution processing of large-scale graphene Tung, Vincent C.; Allen, Matthew J.; Yang, Yang Nature Nanotechnology, Vol. 4, Issue 1 https://doi.org/10.1038/nnano.2008.329	journal	November 2008
Studying disorder in graphite-based systems by Raman spectroscopy Pimenta, M. A.; Dresselhaus, G.; Dresselhaus, M. S. Phys. Chem. Chem. Phys., Vol. 9, Issue 11 https://doi.org/10.1039/B613962K	journal	January 2007
Characterization of Graphite Fiber Surfaces with Raman Spectroscopy Tuinstra, F.; Koenig, J. L. Journal of Composite Materials, Vol. 4, Issue 4 https://doi.org/10.1177/002199837000400405	journal	October 1970
Raman spectroscopy of graphene and graphite: Disorder, electron–phonon coupling, doping and nonadiabatic effects Ferrari, Andrea C. Solid State Communications, Vol. 143, Issue 1-2, p. 47-57 https://doi.org/10.1016/j.ssc.2007.03.052	journal	July 2007
Large-scale pattern growth of graphene films for stretchable transparent electrodes Kim, Keun Soo; Zhao, Yue; Jang, Houk Nature, Vol. 457, Issue 7230 https://doi.org/10.1038/nature07719	journal	January 2009
Periodically Rippled Graphene: Growth and Spatially Resolved Electronic Structure Vázquez de Parga, A. L.; Calleja, F.; Borca, B. Physical Review Letters, Vol. 100, Issue 5 https://doi.org/10.1103/PhysRevLett.100.056807	journal	February 2008
Structural Coherency of Graphene on Ir(111) Coraux, Johann; N‘Diaye, Alpha T.; Busse, Carsten Nano Letters, Vol. 8, Issue 2 https://doi.org/10.1021/nl0728874	journal	February 2008
Energy Band-Gap Engineering of Graphene Nanoribbons Han, Melinda Y.; Özyilmaz, Barbaros; Zhang, Yuanbo Physical Review Letters, Vol. 98, Issue 20 https://doi.org/10.1103/PhysRevLett.98.206805	journal	May 2007
The growth and morphology of epitaxial multilayer graphene Hass, J.; de Heer, W. A.; Conrad, E. H. Journal of Physics: Condensed Matter, Vol. 20, Issue 32 https://doi.org/10.1088/0953-8984/20/32/323202	journal	July 2008

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