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Title: Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance.

Abstract

Abstract not provided.

Authors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1117248
Report Number(s):
SAND2012-4246C
480863
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the IEEE Electron Components and Technology Conference held May 28-30, 2012 in San Diego, CA.
Country of Publication:
United States
Language:
English

Citation Formats

Henry, Michael David, Olsson, Roy H.,, Greth, Karl Douglas, Nordquist, Christopher, Shul, Randy John, Wiwi, Michael., Plut, Thomas A., and Young, Travis Ryan. Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance.. United States: N. p., 2012. Web.
Henry, Michael David, Olsson, Roy H.,, Greth, Karl Douglas, Nordquist, Christopher, Shul, Randy John, Wiwi, Michael., Plut, Thomas A., & Young, Travis Ryan. Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance.. United States.
Henry, Michael David, Olsson, Roy H.,, Greth, Karl Douglas, Nordquist, Christopher, Shul, Randy John, Wiwi, Michael., Plut, Thomas A., and Young, Travis Ryan. Tue . "Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance.". United States. doi:. https://www.osti.gov/servlets/purl/1117248.
@article{osti_1117248,
title = {Hermetic Wafer-Level Packaging for RF MEMs: Effects on Resonator Performance.},
author = {Henry, Michael David and Olsson, Roy H., and Greth, Karl Douglas and Nordquist, Christopher and Shul, Randy John and Wiwi, Michael. and Plut, Thomas A. and Young, Travis Ryan},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 01 00:00:00 EDT 2012},
month = {Tue May 01 00:00:00 EDT 2012}
}

Conference:
Other availability
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