Advances in Ion Beam micromachining for Complex 3D Microfluidics
Journal Article
·
· Journal of Vacuum Science and Technology
- Materials Science Division
Abstract not provided
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- SC OFFICE OF BASIC ENERGY SCIENCES
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 1115899
- Report Number(s):
- ANL/NST/JA-76865
- Journal Information:
- Journal of Vacuum Science and Technology, Journal Name: Journal of Vacuum Science and Technology Journal Issue: 6 ; 2013 Vol. 31; ISSN 0022-5355
- Country of Publication:
- United States
- Language:
- ENGLISH
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