Advances in ion beam micromachining for complex 3D microfluidics

Journal Article · Mon Dec 31 23:00:00 EST 2012 · Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures

DOI:https://doi.org/10.1116/1.4819302· OSTI ID:1115889

Caignaert, V.; Maignan, A.; Singh, K.; Simon, Ch.; Pralong, V.; Raveau, B.; Mitchell, J. F.; Zheng, H.; Chapon, L. C. ^[1]

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1. Materials Science Division

Abstract not provided

• Research Organization: Argonne National Laboratory (ANL)
• Sponsoring Organization: SC OFFICE OF BASIC ENERGY SCIENCES
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 1115889
• Report Number(s): ANL/MSD/JA-75865
• Journal Information: Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures, Journal Name: Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures Journal Issue: 6 ; 2013 Vol. 31; ISSN 0734-211X
• Country of Publication: United States
• Language: ENGLISH