Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films

Lohn, Andrew J.; Doyle, Barney L.; Stein, Gregory J.; Mickel, Patrick R.; Stevens, Jim E.; Marinella, Matthew J.

doi:10.1016/j.nimb.2014.02.038

Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films

Journal Article · Thu Apr 03 00:00:00 EDT 2014 · Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms

DOI:https://doi.org/10.1016/j.nimb.2014.02.038· OSTI ID:1106565

Lohn, Andrew J. ^[1]; Doyle, Barney L. ^[1]; Stein, Gregory J. ^[1]; Mickel, Patrick R. ^[1]; Stevens, Jim E. ^[1]; Marinella, Matthew J. ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

We present a novel ion beam analysis technique combining Rutherford forward scattering and elastic recoil detection (RFSERD) and demonstrate its ability to increase efficiency in determining stoichiometry in ultrathin (5-50 nm) films as compared to Rutherford backscattering. In the conventional forward geometries, scattering from the substrate overwhelms the signal from light atoms but in RFSERD, scattered ions from the substrate are ranged out while forward scattered ions and recoiled atoms from the thin film are simultaneously detected in a single detector. Lastly, the technique is applied to tantalum oxide memristors but can be extended to a wide range of materials systems.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1106565

Alternate ID(s):: OSTI ID: 1106777
OSTI ID: 22423020

Report Number(s):: SAND2013--5614J; PII: S0168583X1400295X

Journal Information:: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms, Journal Name: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms Vol. 332; ISSN 0168-583X

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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71 CLASSICAL AND QUANTUM MECHANICS
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