Method for fabricating a microelectromechanical resonator

Patent · Tue Feb 05 04:00:00 EST 2013

OSTI ID:1083225

Wojciechowski, Kenneth E; Olsson, III, Roy H

A method is disclosed which calculates dimensions for a MEM resonator in terms of integer multiples of a grid width G for reticles used to fabricate the resonator, including an actual sub-width L.sub.a=NG and an effective electrode width W.sub.e=MG where N and M are integers which minimize a frequency error f.sub.e=f.sub.d-f.sub.a between a desired resonant frequency f.sub.d and an actual resonant frequency f.sub.a. The method can also be used to calculate an overall width W.sub.o for the MEM resonator, and an effective electrode length L.sub.e which provides a desired motional impedance for the MEM resonator. The MEM resonator can then be fabricated using these values for L.sub.a, W.sub.e, W.sub.o and L.sub.e. The method can also be applied to a number j of MEM resonators formed on a common substrate.

• Research Organization: SNL (Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States))
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): 8,367,305
• Application Number: 12/884,237
• OSTI ID: 1083225
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING