Analysis of the surface structure of HFCVD diamond films

Technical Report · Sat Jul 01 04:00:00 EDT 1995

DOI:https://doi.org/10.2172/106570· OSTI ID:106570

Mehta, P; Feigerle, C S ^[1]; Clausing, R E; Heatherly, L; Thundat, T ^[2]

---

1. Univ. of Tennessee, Knoxville, TN (United States). Dept. of Chemistry
2. Oak Ridge National Lab., TN (United States)

Structure analysis was carried out on various surface features of diamond films using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The films were grown via hot filament assisted chemical vapor deposition (HFCVD) in methane and hydrogen gas mixtures. The authors investigated the surfaces of films grown under parameters selected to produce certain textures or surface features such as penetration twins or hopper shaped faces. The SEM images of these films show that the {l_brace}100{r_brace} planes are usually flatter than the {l_brace}111{r_brace}. The {l_brace}111{r_brace} planes show interesting growth features. The ``hopper`` shaped structures were imaged in the tapping mode of the AFM, and the angles between planes and their orientations have been determined. These AFM and SEM images are presented with quantitative analyses of the exposed surfaces. Detailed quantitative information will be useful in understanding the growth of these films.

• Research Organization: Oak Ridge National Lab., TN (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States); National Science Foundation, Washington, DC (United States)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 106570
• Report Number(s): CONF-950840--3; ON: DE95014263; CNN: Grant CTS-9202575
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CHEMICAL VAPOR DEPOSITION
CRYSTAL DEFECTS
CRYSTAL GROWTH
CRYSTAL STRUCTURE
CRYSTALLOGRAPHY
DIAGNOSTIC TECHNIQUES
DIAMONDS
EXPERIMENTAL DATA
MORPHOLOGY
ORIENTATION
TEXTURE