Lifetime limitations of Ohmic, contacting RF MEMS switches with Au, Pt, and Ir contact materials due to accumulation of 'friction polymer' on the contacts
Journal Article
·
· J. Micromech. Microeng.
- Center for Nanoscale Materials
Abstract not provided
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- SC OFFICE OF BASIC ENERGY SCIENCES
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 1056190
- Report Number(s):
- ANL/CNM/JA-73662
- Journal Information:
- J. Micromech. Microeng., Journal Name: J. Micromech. Microeng. Journal Issue: 10 ; 2012 Vol. 22; ISSN 0960-1317
- Country of Publication:
- United States
- Language:
- ENGLISH
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