Electrical Contact Resistance and device lifetime measurements of Au-RuO2 based RF MEMS exposed to hydrocarbons in vacuum and nitrogen environments.
Journal Article
·
· Tribology Letters
OSTI ID:1109249
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1109249
- Report Number(s):
- SAND2011-5295J; 471882
- Journal Information:
- Tribology Letters, Journal Name: Tribology Letters
- Country of Publication:
- United States
- Language:
- English
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