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A soft landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch.

Journal Article · · Proposed for publication in the Journal of Microelectromechanical Systems.
OSTI ID:886887
Abstract Not Provided
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
886887
Report Number(s):
SAND2005-7360J
Journal Information:
Proposed for publication in the Journal of Microelectromechanical Systems., Journal Name: Proposed for publication in the Journal of Microelectromechanical Systems.
Country of Publication:
United States
Language:
English

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