A soft landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch.
                            Journal Article
                            ·
                            
                            · Proposed for publication in the Journal of
            Microelectromechanical Systems.
                            
                    
                                
                                OSTI ID:884707
                                
                            
                        No abstract prepared.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 884707
- Report Number(s):
- SAND2005-7358J
- Journal Information:
- Proposed for publication in the Journal of Microelectromechanical Systems., Journal Name: Proposed for publication in the Journal of Microelectromechanical Systems.
- Country of Publication:
- United States
- Language:
- English
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                                        A soft landing waveform for actuation of a single-pole             single- throw ohmic RF MEMS Switch.
                                        
A soft landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch.
Poly-silicon based latching RF MEMS switch.
                        
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                                            Mon Oct 31 23:00:00 EST 2005
                                            · Proposed for publication in the Journal of
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                                        A soft landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch.
                                            Journal Article
                                            ·
                                            Mon Oct 31 23:00:00 EST 2005
                                            · Proposed for publication in the Journal of
            Microelectromechanical Systems.
                                            ·
                                            OSTI ID:886887
                                        
                                        
                                        
                                    
                                
                                    
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                                            Wed Oct 01 00:00:00 EDT 2008
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                                            OSTI ID:951530