Fabrication and characterization of ultra-high resolution multilayer-coated blazed gratings
Conference
·
OSTI ID:1045926
Multilayer coated blazed gratings with high groove density are the most promising candidate for ultra-high resolution soft x-ray spectroscopy. They combine the ability of blazed gratings to concentrate almost all diffraction energy in a desired high diffraction order with high reflectance soft x-ray multilayers. However in order to realize this potential, the grating fabrication process should provide a near perfect groove profile with an extremely smooth surface of the blazed facets. Here we report on successful fabrication and testing of ultra-dense saw-tooth substrates with 5,000 and 10,000 lines/mm.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Advanced Light Source Division; Engineering Division; Materials Sciences Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1045926
- Report Number(s):
- LBNL-4995E; TRN: US201215%%275
- Resource Relation:
- Conference: Pan American SRI2010
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fabrication and characterization of a new high density Sc/Si multilayer sliced grating
High efficiency multilayer blazed gratings for EUV and soft X-rays: Recent developments
5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range
Conference
·
Mon Jul 21 00:00:00 EDT 2008
·
OSTI ID:1045926
+6 more
High efficiency multilayer blazed gratings for EUV and soft X-rays: Recent developments
Conference
·
Tue Jul 26 00:00:00 EDT 2011
·
OSTI ID:1045926
+10 more
5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range
Conference
·
Tue Jul 07 00:00:00 EDT 2009
·
OSTI ID:1045926
+9 more