Ultra-high efficiency multilayer blazed gratings through deposition kinetic control
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Diffraction efficiency of multilayer coated blazed gratings (MBG) strongly depends on the perfection of the saw-tooth-shaped layers in the overall composite structure. Growth of multilayers on saw-tooth substrates should be carefully optimized in order to reduce groove profile distortion and at the same time to avoid significant roughening of multilayer interfaces. In this work we report on a new way to optimize growth of sputter-deposited Mo/Si multilayers on saw-tooth substrates through variation of the sputtering gas pressure. Lastly, a new record for diffraction efficiency of 44% was achieved for a optimized MBG with groove density of 5250 lines/mm at the wavelength of 13.1 nm.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 1093575
- Report Number(s):
- LBNL--5431E
- Journal Information:
- Optics Letters, Journal Name: Optics Letters Journal Issue: 10 Vol. 37; ISSN 0146-9592
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
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