Dependence of the Electron Beam Energy and Types of Surface to Determine EBSD Indexing Reliability in Yttria-Stabilized Zirconia

Journal Article · Sun Apr 01 00:00:00 EDT 2012 · Microscopy and Microanalysis

DOI:https://doi.org/10.1017/S1431927611012815· OSTI ID:1037953

Saraf, Laxmikant V

Electron backscatter diffraction (EBSD) is a powerful technique for the surface microstructure analysis. EBSD analysis of cubic yttria-stabilized zirconia (YSZ) in two and three dimensions (2-D, 3-D) is demonstrated using sequential slicing from a focused ion beam (FIB) followed by EBSD mapping to represent 3-D reconstructed high density grain structure with random orientation. The statistics related to accuracy of EBSD band detection shows that probability of accurate grain orientation detection increased significantly when the electron beam energy is increased from 10 kV to 30 kV. As a result of better sampling with increased interaction volume, a disparity between local and average grain orientation angle also exhibited the dependence of the electron beam energy to determine the accuracy of grain orientation. To study the accuracy and quality of EBSD band detection as a function of surface roughness and over layer formation, rapid EBSD measurement tests are performed on (a) YSZ surfaces ion-polished at ion beam energies of 65 nA at 30 kV and 1 nA at 30 kV and (b) carbon coated versus uncoated YSZ surfaces. The EBSD results at both 10 kV and 30 kV electron beam energies indicate that EBSD band detection accuracy is negatively affected by surface roughness and amorphous over layer formation.

• Research Organization: Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 1037953
• Report Number(s): PNNL-SA-75377; MIMIF7; KP1704020; TRN: US201208%%103
• Journal Information: Microscopy and Microanalysis, Vol. 18, Issue 2; ISSN 1431-9276
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ACCURACY
CARBON
DETECTION
DIFFRACTION
DIMENSIONS
ELECTRON BEAMS
ELECTRONS
GRAIN ORIENTATION
ION BEAMS
MICROSTRUCTURE
ORIENTATION
PROBABILITY
RELIABILITY
ROUGHNESS
SAMPLING
STATISTICS
Effect
e-beam
energy
EBSD
Confidence
Index
Misorientation
angle
Grain
Surface
Flatness
YSZ