Polymer based delivery of vapor phase lubrication for MEMS devices.
Conference
·
OSTI ID:1035989
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1035989
- Report Number(s):
- SAND2010-8660C
- Resource Relation:
- Conference: Proposed for presentation at the Pacificchem Conference held December 15-20, 2010 in Honolulu, HI.
- Country of Publication:
- United States
- Language:
- English
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