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Axial Ge/Si nanowire heterostructure tunnel FETs

Conference ·
OSTI ID:1023412
The vapor-liquid-solid (VLS) growth of semiconductor nanowires allows doping and composition modulation along their axis and the realization of axial 1 D heterostructures. This provides additional flexibility in energy band-edge engineering along the transport direction which is difficult to attain by planar materials growth and processing techniques. We report here on the design, growth, fabrication, and characterization of asymmetric heterostructure tunnel field-effect transistors (HTFETs) based on 100% compositionally modulated Si/Ge axial NWs for high on-current operation and low ambipolar transport behavior. We discuss the optimization of band-offsets and Schottky barrier heights for high performance HTFETs and issues surrounding their experimental realization. Our HTFET devices with 10 nm PECVD SiN{sub x} gate dielectric resulted in a measured current drive exceeding 100 {mu}A/{mu}m (I/{pi}D) and 10{sup 5} I{sub on}/I{sub off} ratios.
Research Organization:
Los Alamos National Laboratory (LANL)
Sponsoring Organization:
DOE
DOE Contract Number:
AC52-06NA25396
OSTI ID:
1023412
Report Number(s):
LA-UR-10-04710; LA-UR-10-4710
Country of Publication:
United States
Language:
English

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