Computational analysis of debris formation in SXPL laser-plasma sources
One of the goals of soft X-ray projection lithography (SXPL) is to devise laser plasma X-ray sources that minimize or entirely eliminate condensed debris. Our progress in developing a computational methodology for analyzing and predicting the formation of target debris in laser generated soft X-ray sources is presented. Our numerical approach requires (1) simulation of the laser/target interaction using the LASNEX radiation hydrodynamics code; (2) simulation of the thermomechanical response of the target using the CTH strong shock code; (3) and detailed debris predictions from extrapolation of CTH results to millisecond time scales via post-processing techniques. We will discuss scaling issues, give examples of calculations, and discuss experimental data.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10180830
- Report Number(s):
- SAND--93-0386C; CONF-9305159--6; ON: DE93019431
- Country of Publication:
- United States
- Language:
- English
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