Computational simulations of a soft x-ray projection lithography laser plasma source
Conference
·
OSTI ID:10143207
A Sandia National Laboratories/AT&T Bell Laboratories Team is developing a soft x-ray projection lithography tool that uses a compact laser plasma as a source of 14 nm x-rays. Optimization of the 14 nm x-rays source brightness is a key issue in this research. This paper describes our understanding of the source as it has been obtained through the use of computer simulations utilizing the LASNEX radiation-hydrodynamics code.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10143207
- Report Number(s):
- SAND--93-0211C; CONF-9305159--1; ON: DE93009625
- Country of Publication:
- United States
- Language:
- English
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