Evaluation of the SC-1/megasonic clean for sub-0.15 micron particle removal
Conference
·
OSTI ID:10162865
A statistical design of experiments approach has been employed to evaluate the particle removal efficacy of the SC-1/megasonic clean for sub-0.15 {mu}m inorganic particles. The effects of megasonic input power, solution chemistry, bath temperature, and immersion time have been investigated. Immersion time was not observed to be a statistically significant factor. The NH{sub 4}OH/H{sub 2}O{sub 2} ratio was significant, but varying the molar H{sub 2}O{sub 2} concentration had no effect on inorganic particle removal. Substantially diluted chemistries, performed with high megasonic input power and moderate-to-elevated temperatures, was shown to be very effective for small particle removal. Bath composition data show extended lifetimes can be obtained when high purity chemicals are used at moderate (eg., 45{degrees}C) temperature. Transition metal surface concentrations and surface roughness have been measured after dilute SC-1 processing and compared to metallic contamination following traditional SC-1.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10162865
- Report Number(s):
- SAND--94-1496C; CONF-9410134--1; ON: DE94014282; BR: GB0103012
- Country of Publication:
- United States
- Language:
- English
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