High spatial resolution microanalysis in the analytical electron microscope: A tutorial

Conference · Wed Apr 01 00:00:00 EST 1992

OSTI ID:10136449

Romig, Jr, A D; Michael, J R

High spatial resolution x-ray microanalysis in the analytical electron microscope (AEM) describes a technique by which chemical composition can be determined on spatial scales of less than 50 nm. Dependent upon the size of the incident probe, the energy (voltage) of the beam, the average atomic number of the material being analyzed, and the thickness of the specimens at the point of analysis it is possible to measure uniquely the composition of a region 2--20 nm in diameter. Conventional thermionic (tungsten or LaB{sub 6}) AEMs can attain direct spatial resolutions as small as 20 nm, while field emission (FEG) AEM`s can attain direct spatial resolutions approaching 2 nm. Recently, efforts have been underway to extract compositional information on a finer spatial scale by using massively parallel Monte Carlo electron trajectory simulations coupled with AEM measurements. By deconvolving the measured concentration profile with the calculated x-ray generation profile it is possible to extract compositional information at near atomic resolution.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 10136449
• Report Number(s): SAND-92-0603C; CONF-920819-5; ON: DE92010958
• Resource Relation: Conference: Annual meeting of the Electron Microscopy Society (EMS) of America,Boston, MA (United States),16-21 Aug 1992; Other Information: PBD: [1992]
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
74 ATOMIC AND MOLECULAR PHYSICS
ELECTRON MICROSCOPES
SPATIAL RESOLUTION
NICKEL ALLOYS
ELECTRON MICROSCOPY
IRON ALLOYS
CHROMIUM BASE ALLOYS
MONTE CARLO METHOD
SCATTERING
PARALLEL PROCESSING
ELECTRON BEAMS
440800
990200
664300
MISCELLANEOUS INSTRUMENTATION
MATHEMATICS AND COMPUTERS
COLLISION PHENOMENA