High spatial resolution microanalysis in the analytical electron microscope: A tutorial
High spatial resolution x-ray microanalysis in the analytical electron microscope (AEM) describes a technique by which chemical composition can be determined on spatial scales of less than 50 nm. Dependent upon the size of the incident probe, the energy (voltage) of the beam, the average atomic number of the material being analyzed, and the thickness of the specimens at the point of analysis it is possible to measure uniquely the composition of a region 2--20 nm in diameter. Conventional thermionic (tungsten or LaB{sub 6}) AEMs can attain direct spatial resolutions as small as 20 nm, while field emission (FEG) AEM's can attain direct spatial resolutions approaching 2 nm. Recently, efforts have been underway to extract compositional information on a finer spatial scale by using massively parallel Monte Carlo electron trajectory simulations coupled with AEM measurements. By deconvolving the measured concentration profile with the calculated x-ray generation profile it is possible to extract compositional information at near atomic resolution.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 5151984
- Report Number(s):
- SAND-92-0603C; CONF-920819-5; ON: DE92010958
- Resource Relation:
- Conference: Annual meeting of the Electron Microscopy Society (EMS) of America, Boston, MA (United States), 16-21 Aug 1992
- Country of Publication:
- United States
- Language:
- English
Similar Records
Near atomic resolution microanalysis of interfaces by analytical electron microscopy
Application of parallel computing to the Monte Carlo simulation of electron scattering in solids: A rapid method for profile deconvolution
Related Subjects
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
74 ATOMIC AND MOLECULAR PHYSICS
CHROMIUM BASE ALLOYS
ELECTRON MICROSCOPY
ELECTRON MICROSCOPES
SPATIAL RESOLUTION
IRON ALLOYS
NICKEL ALLOYS
ELECTRON BEAMS
MONTE CARLO METHOD
PARALLEL PROCESSING
SCATTERING
ALLOYS
BEAMS
CHROMIUM ALLOYS
LEPTON BEAMS
MICROSCOPES
MICROSCOPY
PARTICLE BEAMS
PROGRAMMING
RESOLUTION
440800* - Miscellaneous Instrumentation- (1990-)
990200 - Mathematics & Computers
664300 - Atomic & Molecular Physics- Collision Phenomena- (1992-)