skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Application of parallel computing to the Monte Carlo simulation of electron scattering in solids: A rapid method for profile deconvolution

Conference ·
OSTI ID:6449652
; ;  [1]; ;  [2]
  1. Sandia National Labs., Albuquerque, NM (USA)
  2. National Inst. of Standards and Technology, Gaithersburg, MD (USA)

X-ray microanalysis by analytical electron microscopy (AEM) has proven to be a powerful tool for characterizing the spatial distribution of solute elements in materials. True compositional variations over spatial scales smaller than the actual resolution for microanalysis can be determined if the measured composition profile is deconvoluted. Explicit deconvolutions of such data, via conventional techniques such as Fourier transforms, are not possible due to statistical noise in AEM microanalytical data. Hence, the method of choice is to accomplish the deconvolution via iterative convolutions. In this method, a function describing the assumed true composition profile, calculated by physically permissible thermodynamic and kinetic modeling, is convoluted with the x-ray generation function and the result compared to the measured composition profile. If the measured and calculated profiles agree within experimental error, it is assumed that the true compositional profile has been determined. If the measured and calculated composition profiles are in disagreement, the assumptions in the physical model are adjusted and the convolution process repeated. To employ this procedure it is necessary to calculate the x-ray generation function explicitly. While a variety of procedures are available for calculating this function, the most accurate procedure is to use Monte Carlo modeling of electron scattering.

Research Organization:
Sandia National Labs., Albuquerque, NM (USA)
Sponsoring Organization:
DOE/DP; DOE/ER
DOE Contract Number:
AC04-76DP00789
OSTI ID:
6449652
Report Number(s):
SAND-90-2549C; CONF-900877-9; ON: DE91001227
Resource Relation:
Conference: 12. international congress for electron microscopy, Seattle, WA (USA), 12-18 Aug 1990
Country of Publication:
United States
Language:
English