Methods for the fabrication of thermally stable magnetic tunnel junctions

Chang, Y Austin; Yang, Jianhua J; Ladwig, Peter F

Methods for the fabrication of thermally stable magnetic tunnel junctions

Patent · Tue Aug 25 04:00:00 EDT 2009

OSTI ID:1013638

Chang, Y Austin ^[1]; Yang, Jianhua J ^[2]; Ladwig, Peter F ^[3]

Middleton, WI
Madison, WI
Hutchinson, MN

Magnetic tunnel junctions and method for making the magnetic tunnel junctions are provided. The magnetic tunnel junctions are characterized by a tunnel barrier oxide layer sandwiched between two ferromagnetic layers. The methods used to fabricate the magnetic tunnel junctions are capable of completely and selectively oxidizing a tunnel junction precursor material using an oxidizing gas containing a mixture of gases to provide a tunnel junction oxide without oxidizing the adjacent ferromagnetic materials. In some embodiments the gas mixture is a mixture of CO and CO.sub.2 or a mixture of H.sub.2 and H.sub.2O.

Research Organization:: Wisconsin Alumni Research Foundation (Madison, WI)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-99ER45777

Assignee:: Wisconsin Alumni Research Foundation (Madison, WI)

Patent Number(s):: 7,579,042

Application Number:: 10/902,281

OSTI ID:: 1013638

Country of Publication:: United States

Language:: English

References (12)

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