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Pulsed DC magnetron sputtered nickel thin films : a study of stress, density and electronic properties.

Conference ·
OSTI ID:1012747
;
No abstract prepared.
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1012747
Report Number(s):
SAND2010-2988C
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
DENSITY
ELECTRICAL PROPERTIES
NICKEL
SPUTTERING
STRESSES
THIN FILMS