Pulsed DC magnetron sputtered nickel thin films : a study of stress, density and electronic properties.
Conference
·
OSTI ID:1027063
Abstract Not Provided
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1027063
- Report Number(s):
- SAND2010-6796C
- Country of Publication:
- United States
- Language:
- English
Similar Records
Pulsed DC magnetron sputtered nickel thin films : a study of stress, density and electronic properties.
Pulsed DC magnetron sputtered nickel thin films :
Low Stress Thin Film Depositions Via RF Sputtering .
Conference
·
Sat May 01 00:00:00 EDT 2010
·
OSTI ID:1012747
Pulsed DC magnetron sputtered nickel thin films :
Conference
·
Sun May 01 00:00:00 EDT 2011
·
OSTI ID:1289700
Low Stress Thin Film Depositions Via RF Sputtering .
Conference
·
Sun Jul 01 00:00:00 EDT 2012
·
OSTI ID:1064143