Stress related anisotropy studies in DC-magnetron sputtered TbCo and TbFe films

Conference · Fri Sep 01 04:00:00 EDT 1989 · IEEE (Institute of Electrical and Electronics Engineers) Transactions on Magnetics; (USA)

OSTI ID:5306396

Cheng, S C.N.; Kryder, M H; Mathur, M C.A. ^[1]

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1. Magnetics Technology Center, Carnegie Mellon Univ. (US)

A series of TbCo films and a series of TbFe films were prepared by de-magnetron sputtering at different deposition powers and Ar sputtering pressures. It was found that anisotropy decreased with an increase of deposition power. The authors discuss how anisotropy showed a peak within the range of 2.5 mtorr to 11.5 mtorr of Ar sputtering pressures. The perpendicular magnetic anisotropy of films which were still attached to their substrates and films which had been removed from their substrates were compared. The percentage change in K/sub u/, which occurred when the film was removed from its substrate, correlated with the rise and fall of perpendicular anisotropy, although changes were also typically large at 2.5 mtorr of Ar sputtering pressure. Changes in K/sub u/ after removal from the substrate were as large as 46% in TbFe films deposited at 2.5 mtorr of Ar sputtering pressure. Larger percentage changes in K/sub u/ was found in de-magnetron sputtered films than were previously reported for rf-sputtered TbFe and TbCo films. The films deposited onto thick polycarbonate substrates had the largest anisotropy and also suffered the largest percentage change in anisotropy when they were removed from the substrate.

• OSTI ID: 5306396
• Report Number(s): CONF-890309--
• Conference Information: Journal Name: IEEE (Institute of Electrical and Electronics Engineers) Transactions on Magnetics; (USA) Journal Volume: 25:5
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360104 -- Metals & Alloys-- Physical Properties
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
ANISOTROPY
ARGON
COBALT ALLOYS
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
FLUIDS
GASES
IRON ALLOYS
MAGNETIC PROPERTIES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
RARE GASES
SPUTTERING
STRESSES
TERBIUM ALLOYS
THIN FILMS