Growth of BN Thin Films by Pulsed Laser Deposition
Conference
·
· Materials Research Society Symposia Proceedings
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
A new UHV system for pulsed laser deposition of materials is described, together with results from preliminary experiments for depositions of BN on Si. The system is designed to allow for in-situ diagnostics of the ablation plasma, as well as UHV preparation and characterization of clean sample substrates. The room temperature depositions of BN result in amorphous, B-rich films, whose particle content is a strong function of laser wavelength.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10115530
- Report Number(s):
- SAND--91-1528C; CONF-911202--33; ON: DE92005462
- Journal Information:
- Materials Research Society Symposia Proceedings, Journal Name: Materials Research Society Symposia Proceedings Vol. 235; ISSN 1946-4274; ISSN 0272-9172
- Publisher:
- Springer Nature
- Country of Publication:
- United States
- Language:
- English
Laser pulse vapour deposition of polycrystalline wurtzite-type BN
|
journal | February 1987 |
Growth and characterization of epitaxial cubic boron nitride films on silicon
|
journal | March 1991 |
Similar Records
Growth of BN thin films by pulsed laser deposition
Dynamics of laser ablation for thin film growth by pulsed laser deposition
Growth of cubic BN films on {beta}-SiC by ion-assisted pulsed laser deposition
Conference
·
Mon Dec 31 23:00:00 EST 1990
·
OSTI ID:5958396
Dynamics of laser ablation for thin film growth by pulsed laser deposition
Conference
·
Wed Jan 31 23:00:00 EST 1996
·
OSTI ID:225057
Growth of cubic BN films on {beta}-SiC by ion-assisted pulsed laser deposition
Journal Article
·
Mon May 22 00:00:00 EDT 1995
· Applied Physics Letters
·
OSTI ID:46410