Optimization of experimental conditions in IR reflectance determination of BPSG properties

Conference · Sun Oct 31 23:00:00 EST 1993

OSTI ID:10104438

Zhang, L; Franke, J E; Niemczyk, T M ^[1]; Haaland, D M ^[2]

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1. New Mexico Univ., Albuquerque, NM (United States). Dept. of Chemistry
2. Sandia National Labs., Albuquerque, NM (United States)

Experiments were performed to examine sensitivity of thin-film property determinations to several experimental variables when applying multivariate calibration methods to infrared reflection spectroscopic data. Results indicate that low angles of incidence are best for robust quantitative determination of boron, phosphorus, and film thickness in borophosphosilicate glass (BPSG) dielectric films. However, the polarization state of the incidence beam does not affect the quantitative prediction ability.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 10104438
• Report Number(s): SAND--93-2118C; CONF-9309208--4; ON: DE94002742; BR: GB0103012
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360600
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102
BORON COMPOUNDS
CHEMICAL ANALYSIS
CHEMICAL AND SPECTRAL PROCEDURES
DIELECTRIC MATERIALS
GLASS
INFRARED RADIATION
INFRARED SPECTRA
OPTIMIZATION
OTHER MATERIALS
PARAMETRIC ANALYSIS
PHOSPHORUS COMPOUNDS
REFLECTION
SILICATES
SPECTROSCOPY
THIN FILMS