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Title: A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution

Conference ·
DOI:https://doi.org/10.1117/12.680975· OSTI ID:1008977

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Sponsoring Organization:
USDOE
OSTI ID:
1008977
Resource Relation:
Conference: Proceedings of the SPIE - The International Society for Optical Engineering ;Aug. 15, 2006;San Diego, CA
Country of Publication:
United States
Language:
ENGLISH

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