A Full-Field KB-FZP Microscope for Hard X-Ray Imaging with Sub 100 nm Resolution
- UIUC
A full-field hard X-ray microscope has been built at the UNICAT/APS beamline 34ID-C. A Kirkpatrick-Baez mirror is used for the condenser and a micro-Fresnel Zone Plate (FZP) as the objective lens. The zone plates available give access to 50-85 nm spatial resolution operating the microscope between 6-12keV photon energy. The first tomography experiments have been performed with this device. A KB-FZP microscope has been built for sub-100 nm imaging and tomography. Features of 50 nm have been visualized at 9 keV photon energy. A 40 x 20 microns field of view of can be imaged in a minute. The first tomography experiments have been performed with this device. Further, it is planned to apply phase contrast techniques, such as the Zernike method. Both the efficiency and the resolution of the instrument can be further improved. A more efficient zone plate and an improved detector will reduce the exposure times and the use of the 50x100 times more intense so called 'pink-beam' is possible. To improve the resolution, the zone plates deliver in their third order a resolution of 15 nm. A KB-FZP microscope has been built for sub-100 nm imaging and tomography. Features of 50 nm have been visualized at 9 keV photon energy. A 40 x 20 microns field of view of can be imaged in seconds. Tomography experiments have been performed with this device. Phase objects have been visualized taking image series. Phase contrast techniques, such as the Zernike method will be tested in the future. Both the efficiency and the resolution of the instrument can be further improved. Together with the instrument for In-line phase contrast imaging the nano- and micrometer lenghtscale is covered.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 1008976
- Resource Relation:
- Conference: Proceedings of the 8th International Conference on X-ray Microscopy;26-30 July 2005;Himeji, Japan
- Country of Publication:
- United States
- Language:
- ENGLISH
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