Microstructure of (110)-Oriented Epitaxial SrRuO3 Thin Films Grown on Off-Cut Single Crystal YSZ(100) Substrates
Journal Article
·
· Materials Science and Engineering B
- Max-Planck-Institut fur Mikrostrukturphysik, Germany
- ORNL
The microstructure of (1 1 0){sup pc}-oriented epitaxial SrRuO{sub 3} (SRO) thin films grown by pulsed laser deposition on (1 0 0)YSZ (YSZ: yttria-stabilized zirconia) single crystal substrates with a miscut angle of 5{sup o} has been investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM). The films grow epitaxially with their pseudocubic (1 1 0) plane parallel to the (1 0 0) surface of the YSZ single crystal substrate, and with an in-plane orientation relationship of [{ovr 1} 1 1]{sub SRO}//[0 1 1]{sub YSZ}. Cross-sectional TEM investigations show that the films have a rough, facetted surface. Generally, four different azimuthal domains are present in (1 1 0)SRO films on (1 0 0)YSZ. Their number can be significantly reduced using annealed offcut YSZ substrates before SRO deposition, and this reduction effect is shown to be much stronger on [0 1 1]-miscut (1 0 0)YSZ than on [0 0 1]-miscut ones. Size and morphology of the azimuthal pseudocubic domains and their domain boundaries, as well as of anti-phase domains and their domain boundaries are studied by plan-view and cross-section TEM.
- Research Organization:
- Oak Ridge National Laboratory (ORNL)
- Sponsoring Organization:
- SC USDOE - Office of Science (SC)
- DOE Contract Number:
- AC05-00OR22725
- OSTI ID:
- 1003159
- Journal Information:
- Materials Science and Engineering B, Journal Name: Materials Science and Engineering B Journal Issue: 1-3 Vol. 118; ISSN 0921-5107
- Country of Publication:
- United States
- Language:
- English
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