Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers
Abstract
The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing an ion beam at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.
- Inventors:
- Issue Date:
- Research Org.:
- Harvard Univ., Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531744
- Patent Number(s):
- 8221595
- Application Number:
- 12/381,502
- Assignee:
- President and Fellows of Harvard College (Cambridge, MA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- FG02-01ER45922
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2009-03-12
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Branton, Daniel, Golovchenko, Jene A., King, Gavin M, MoberlyChan, Warren J, and Schurmann, Gregor M. Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers. United States: N. p., 2012.
Web.
Branton, Daniel, Golovchenko, Jene A., King, Gavin M, MoberlyChan, Warren J, & Schurmann, Gregor M. Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers. United States.
Branton, Daniel, Golovchenko, Jene A., King, Gavin M, MoberlyChan, Warren J, and Schurmann, Gregor M. Tue .
"Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers". United States. https://www.osti.gov/servlets/purl/1531744.
@article{osti_1531744,
title = {Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers},
author = {Branton, Daniel and Golovchenko, Jene A. and King, Gavin M and MoberlyChan, Warren J and Schurmann, Gregor M},
abstractNote = {The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing an ion beam at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 17 00:00:00 EDT 2012},
month = {Tue Jul 17 00:00:00 EDT 2012}
}
Works referenced in this record:
"Sputtering" of Ice by MeV Light Ions
journal, April 1978
- Brown, W. L.; Lanzerotti, L. J.; Poate, J. M.
- Physical Review Letters, Vol. 40, Issue 15
Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
patent, August 2011
- Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M.
- US Patent Document 7,993,538
Linear and Nonlinear Processes in the Erosion of O Ice by Fast Light Ions
journal, November 1980
- Brown, W. L.; Augustyniak, W. M.; Lanzerotti, L. J.
- Physical Review Letters, Vol. 45, Issue 20
Growth of Dielectric Thin Films by Irradiation of Condensed Molecular Precursors with Synchrotron Radiation
journal, January 1992
- Strongin, D. R.; Moore, J. F.; Ruckman, M. W.
- MRS Proceedings, Vol. 282
Dry process for the production of microelectronic devices
patent, September 1982
- Okumura, Koji; Saeva, Franklin D.
- US Patent Document 4,348,473
Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers
patent, April 2009
- Branton, Daniel; Golovchenko, Jene A.; King, Gavin M.
- US Patent Document 7,524,431
Supercooled and glassy water
journal, October 2003
- Debenedetti, Pablo G.
- Journal of Physics: Condensed Matter, Vol. 15, Issue 45
Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
patent, July 2007
- Koops, Hans; Edinger, Klaus
- US Patent Document 7,238,294
Novolak resin blends for photoresist applications
patent, December 1994
- Lynch, Thomas J.; Sobodacha, Chester J.; Durham, Dana L.
- US Patent Document 5,374,693
Thickness dependent crystallization kinetics of sub-micron amorphous solid water films
journal, March 2003
- Safarik, D. J.; Meyer, R. J.; Mullins, C. B.
- The Journal of Chemical Physics, Vol. 118, Issue 10
Amorphous Water
journal, June 2004
- Angell, C. Austen
- Annual Review of Physical Chemistry, Vol. 55, Issue 1
Process for fabricating cryogenic targets and targets made thereby
patent, August 1985
- Whitlock, Robert R.
- US Patent Document 4,535,023
Three dimensional imaging system
patent, January 2000
- Wohlstadter, Jacob N.
- US Patent Document 6,014,259
Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
patent, October 2008
- Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M.
- US Patent Document 7,435,353
Nanolithography using field emission and conventional thermionic electron sources
journal, April 1989
- Devenish, R. W.; Eaglesham, D. J.; Maher, D. M.
- Ultramicroscopy, Vol. 28, Issue 1-4
Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers
patent-application, July 2009
- Branton, Daniel; Golovchenko, JeneA.; King, Gavin M.
- US Patent Application 12/381502; 20090173716
Methods for modifying surfaces
patent-application, June 2007
- Koberstein, Jeffrey T.; Wang, Peng; Pan, Feng
- US Patent Application 11/454652; 20070134420
Method for producing high quality thin layer films on substrates
patent, April 1994
- Strongin, Myron; Ruckman, Mark W.; Strongin, Daniel R.
- US Patent Document 5,306,530
Nanometer Patterning with Ice
journal, June 2005
- King, Gavin M.; Schürmann, Gregor; Branton, Daniel
- Nano Letters, Vol. 5, Issue 6
Device and method for accurate etching and removal of thin film
patent, February 1994
- Jeng, Shwu-Jen; Natzle, Wesley C.; Yu, Chienfan
- US Patent Document 5,282,925
Sublimation of vapor-deposited water ice below 170 K, and its dependence on growth conditions
journal, October 1993
- Sack, N. J.; Baragiola, R. A.
- Physical Review B, Vol. 48, Issue 14
Gas photonanograph for producing and optically analyzing nanometre scale patterns
patent, April 1995
- Licoppe, Christian; Bensoussan, Marcel
- US Patent Document 5,405,481
On the mechanism of formation of amorphous condensates from the vapour phase (I). General theory
journal, October 1974
- Gutzov, I.; Avramov, I.
- Journal of Non-Crystalline Solids, Vol. 16, Issue 1
Dependence of the dissolution characteristics of As2S3 as a photoresist on the condensation rate and evaporation temperature
journal, May 1989
- Mednikarov, B.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 7, Issue 3
Etching of Si through a thick condensed XeF[sub 2] layer
journal, January 2000
- Sebel, P. G. M.; Hermans, L. J. F.; Beijerinck, H. C. W.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 18, Issue 5
Carbon nanotube synthesis for nanopore devices
patent-application, May 2009
- Branton, Daniel; Golovchenko, Jene A.; Garaj, Slaven
- US Patent Application 12/286849; 20090136682
Method of manufacturing devices having superlattice structures
patent, January 1991
- Yamaguchi, Hiroshi; Saito, Keiya; Itoh, Fumikazu
- US Patent Document 4,983,540