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Title: Thermal microphotonic sensor and sensor array

Patent ·
OSTI ID:978697
 [1];  [2];  [1];  [1]
  1. Albuquerque, NM
  2. Tijeras, NM
+ Show Author Affiliations

A thermal microphotonic sensor is disclosed for detecting infrared radiation using heat generated by the infrared radiation to shift the resonant frequency of an optical resonator (e.g. a ring resonator) to which the heat is coupled. The shift in the resonant frequency can be determined from light in an optical waveguide which is evanescently coupled to the optical resonator. An infrared absorber can be provided on the optical waveguide either as a coating or as a plate to aid in absorption of the infrared radiation. In some cases, a vertical resonant cavity can be formed about the infrared absorber to further increase the absorption of the infrared radiation. The sensor can be formed as a single device, or as an array for imaging the infrared radiation.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
7,667,200
Application Number:
11/950,821
OSTI ID:
978697
Country of Publication:
United States
Language:
English

References (10)

Evaluation of thermal parameters of bolometer devices journal March 2002
Ultra-high-Q toroid microcavity on a chip journal February 2003
Micromachined bolometer with single-crystal silicon diode as temperature sensor journal May 2005
Fabrication techniques for low-loss silicon nitride waveguides conference January 2005
Uncooled IR imaging array based on quartz microresonators journal June 1996
Performance of 320 x 240 uncooled IRFPA with SOI diode detectors conference December 2000
Thermal Microphotonic Focal Plane Array (TM-FPA) for Uncooled High Sensitivity Thermal Imaging conference May 2007
Heavy water detection using ultra-high-Q microcavities journal January 2006
Experimental results on a quartz microresonator IR sensor
  • Rim, Y.; Vig, J. R.
  • 1997 IEEE Ultrasonics Symposium An International Symposium, 1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118) https://doi.org/10.1109/ULTSYM.1997.663060
conference January 1997
High-Q microring resonator for biochemical sensors conference March 2005

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