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Title: Heterodyne interferometer with angstrom-level periodic nonlinearity

Patent ·
OSTI ID:920035

Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acousto-optic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.

Sponsoring Organization:
USDOE
Assignee:
The United States of America as represented by the Department of Energy (Washington, DC)
Patent Number(s):
6,847,455
Application Number:
10/254,567
OSTI ID:
920035
Country of Publication:
United States
Language:
English

References (13)

Non-linearity in length measurement using heterodyne laser Michelson interferometry journal October 1987
A simple technique for observing periodic nonlinearities in Michelson interferometers journal October 1998
A frequency domain method for the measurement of nonlinearity in heterodyne interferometry journal January 2000
Optical sources of non-linearity in heterodyne interferometers journal January 1990
Recent advances in displacement measuring interferometry journal September 1993
Sub-micron position measurement and control on precision machine tools with laser interferometry journal January 1990
Analysis of the measurement error of the parameters of mechanical vibrations journal July 1980
Heterodyne interferometer to measure vibration parameters journal January 1984
Residual errors in laser interferometry from air turbulence and nonlinearity journal January 1987
Linear Interpolation of Periodic 633nm in Heterodyne Laser Interferometer for Subnanometer Dimensional Measurement conference June 1988
Analytical modeling of the periodic nonlinearity in heterodyne interferometry journal January 1998
Probing of Acoustic Surface Perturbations by Coherent Light journal January 1969
Heterodyne interferometer with subatomic periodic nonlinearity journal January 1999

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