Sputtering process and apparatus for coating powders

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874274

Makowiecki, Daniel M ^[1]; Kerns, John A ^[1]; Alford, Craig S ^[2]; McKernan, Mark A ^[1]

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1. Livermore, CA
2. Tracy, CA

A process and apparatus for coating small particles and fibers. The process involves agitation by vibrating or tumbling the particles or fibers to promote coating uniformly, removing adsorbed gases and static charges from the particles or fibers by an initial plasma cleaning, and coating the particles or fibers with one or more coatings, a first coating being an adhesion coating, and with subsequent coatings being deposited in-situ to prevent contamination at layer interfaces. The first coating is of an adhesion forming element (i.e. W, Zr, Re, Cr, Ti) of a 100-10,000 .ANG. thickness and the second coating or final coating of a multiple (0.1-10 microns) being Cu or Ag, for example for brazing processes, or other desired materials that defines the new surface related properties of the particles. An essential feature of the coating process is the capability to deposit in-situ without interruption to prevent the formation of a contaminated interface that could adversely affect the coating adhesion. The process may include screening of the material to be coated and either continuous or intermittent vibration to prevent agglomeration of the material to be coated.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: The Regents of the University of California (Oakland, CA)
• Patent Number(s): US 6355146
• OSTI ID: 874274
• Country of Publication: United States
• Language: English

Related Subjects

sputtering
process
apparatus
coating
powders
particles
fibers
involves
agitation
vibrating
tumbling
promote
uniformly
removing
adsorbed
gases
static
charges
initial
plasma
cleaning
coatings
adhesion
subsequent
deposited
in-situ
prevent
contamination
layer
interfaces
forming
element
zr
100-10000
ang
thickness
final
multiple
01-10
microns
example
brazing
processes
materials
defines
surface
related
properties
essential
feature
capability
deposit
interruption
formation
contaminated
interface
adversely
affect
screening
material
coated
continuous
intermittent
vibration
agglomeration
adversely affect
sputtering process
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