Vacuum fusion bonding of glass plates
- Livermore, CA
An improved apparatus and method for vacuum fusion bonding of large, patterned glass plates. One or both glass plates are patterned with etched features such as microstructure capillaries and a vacuum pumpout moat, with one plate having at least one hole therethrough for communication with a vacuum pumpout fixture. High accuracy alignment of the plates is accomplished by a temporary clamping fixture until the start of the fusion bonding heat cycle. A complete, void-free fusion bond of seamless, full-strength quality is obtained through the plates; because the glass is heated well into its softening point and because of a large, distributed force that is developed that presses the two plates together from the difference in pressure between the furnace ambient (high pressure) and the channeling and microstructures in the plates (low pressure) due to the vacuum drawn. The apparatus and method may be used to fabricate microcapillary arrays for chemical electrophoresis; for example, any apparatus using a network of microfluidic channels embedded between plates of glass or similar moderate melting point substrates with a gradual softening point curve, or for assembly of glass-based substrates onto larger substrates, such as in flat panel display systems.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 6131410
- OSTI ID:
- 873302
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
fusion
bonding
glass
plates
improved
apparatus
method
patterned
etched
features
microstructure
capillaries
pumpout
moat
plate
therethrough
communication
fixture
accuracy
alignment
accomplished
temporary
clamping
start
heat
cycle
complete
void-free
bond
seamless
full-strength
quality
obtained
heated
softening
distributed
force
developed
presses
difference
pressure
furnace
ambient
channeling
microstructures
due
drawn
fabricate
microcapillary
arrays
chemical
electrophoresis
example
network
microfluidic
channels
embedded
similar
moderate
melting
substrates
gradual
curve
assembly
glass-based
larger
flat
panel
display
systems
vacuum pumpout
vacuum fusion
improved apparatus
flat panel
glass plates
panel display
vacuum pump
fusion bonding
vacuum drawn
capillary array
moderate melting
glass plate
display systems
pumpout moat
patterned glass
microstructure capillaries
gradual softening
fusion bond
etched features
microfluidic channel
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