Method of producing solution-derived metal oxide thin films

Patent · Sat Jan 01 00:00:00 EST 2000

OSTI ID:873083

Boyle, Timothy J ^[1]; Ingersoll, David ^[1]

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1. Albuquerque, NM

A method of preparing metal oxide thin films by a solution method. A .beta.-metal .beta.-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6086957
• OSTI ID: 873083
• Country of Publication: United States
• Language: English

Related Subjects

method
producing
solution-derived
metal
oxide
films
preparing
solution
beta
-metal
-diketonate
carboxylate
compound
selected
10
11
12
periodic
table
solubilized
strong
lewis
base
form
homogeneous
precursor
forms
minutes
deposited
substrate
single
layer
multiple
layers
film
heated
change
amorphous
phase
ceramic
cooled
amorphous phase
multiple layer
lewis base
preparing metal
precursor solution
ceramic metal
single layer
metal oxide
periodic table
multiple layers
solution form
strong lewis
solution forms
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