Micro benchtop optics by bulk silicon micromachining
- Walnut Creek, CA
- Livermore, CA
- Pleasanton, CA
Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 6071426
- OSTI ID:
- 873023
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
benchtop
optics
bulk
silicon
micromachining
utilizing
parallel
etching
characteristics
integrating
etch
planes
wafer
bonding
impurity
doping
enables
fabrication
on-chip
situ
aligned
etched
grooves
optical
fibers
micro-lenses
photodiodes
laser
diodes
components
microfabricated
integrated
semi-transparent
beam
splitters
micro-optical
scanners
pinholes
gratings
filters
etc
utilized
miniaturization
bio-instrumentation
wavelength
monitoring
fluorescence
spectrometers
miniaturized
systems
fabry-perot
interferometry
filtering
wavelengths
tunable
cavity
lasers
micro-holography
modules
communication
laser diodes
optical systems
optical communication
optical components
optical filter
beam splitter
optical fibers
optical fiber
laser diode
silicon wafer
bulk silicon
communication systems
optical scanner
beam splitters
silicon micromachining
optical component
optical filters
optical grating
fabry-perot interferometry
parallel etch
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