Background-reducing X-ray multilayer mirror
- Los Alamos, NM
Background-reducing x-ray multilayer mirror. A multiple-layer "wavetrap" deposited over the surface of a layered, synthetic-microstructure soft x-ray mirror optimized for reflectivity at chosen wavelengths is disclosed for reducing the reflectivity of undesired, longer wavelength incident radiation incident thereon. In three separate mirror designs employing an alternating molybdenum and silicon layered, mirrored structure overlaid by two layers of a molybdenum/silicon pair anti-reflection coating, reflectivities of near normal incidence 133, 171, and 186 .ANG. wavelengths have been optimized, while that at 304 .ANG. has been minimized. The optimization process involves the choice of materials, the composition of the layer/pairs as well as the number thereof, and the distance therebetween for the mirror, and the simultaneous choice of materials, the composition of the layer/pairs, and their number and distance for the "wavetrap."
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 5086443
- OSTI ID:
- 868164
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
x-ray
multilayer
mirror
multiple-layer
wavetrap
deposited
surface
layered
synthetic-microstructure
soft
optimized
reflectivity
chosen
wavelengths
disclosed
reducing
undesired
wavelength
incident
radiation
thereon
separate
designs
employing
alternating
molybdenum
silicon
mirrored
structure
overlaid
layers
pair
anti-reflection
coating
reflectivities
near
normal
incidence
133
171
186
ang
304
minimized
optimization
process
involves
choice
materials
composition
layer
pairs
distance
therebetween
simultaneous
normal incidence
incident radiation
process involves
silicon layer
soft x-ray
radiation incident
x-ray multilayer
anti-reflection coating
near normal
multilayer mirror
chosen wavelength
x-ray mirror
incident thereon
silicon layered
background-reducing x-ray
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