Cryopump
- Ellington, CT
A cryopump having a cryopanel adapted for being cooled by a first refrigerant and shielded from radiation incident thereon by shields adapted for being cooled with a second refrigerant is disclosed. The cryopanel and the radiation shield are fabricated with a first material having high thermal conductivity, such as aluminum, while means for distributing refrigerant from refrigerant dewars to the cryopanel and shields are made of a second material, such as stainless steel. The stainless steel and aluminum sections are connected by an aluminum-steel transition connector adapted for providing vacuum tight connections at cryogenic temperatures. Both the cryopanel and chevrons comprising the shields are fabricated and extruded aluminum with coolant passages formed therein. Thermal distortions during operation are compensated by the use of stainless steel bellows within refrigerant distribution lines. Additionally the refrigerant distribution lines are utilized to suspend the cryopanel and shields within an evacuated environment of the cryopump.
- Research Organization:
- United Technologies Research Center, East Hartford, CT (United States)
- DOE Contract Number:
- EY-76-C-02-2277
- Assignee:
- United Technologies Corporation (Hartford, CT)
- Patent Number(s):
- US 4207746
- OSTI ID:
- 863595
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
cryopanel
adapted
cooled
refrigerant
shielded
radiation
incident
thereon
shields
disclosed
shield
fabricated
material
thermal
conductivity
aluminum
means
distributing
dewars
stainless
steel
sections
connected
aluminum-steel
transition
connector
providing
vacuum
tight
connections
cryogenic
temperatures
chevrons
comprising
extruded
coolant
passages
formed
therein
distortions
operation
compensated
bellows
distribution
lines
additionally
utilized
suspend
evacuated
environment
passages formed
cryogenic temperature
cryogenic temperatures
formed therein
radiation shield
thermal conductivity
stainless steel
radiation incident
coolant passages
distribution lines
coolant passage
vacuum tight
incident thereon
thermal distortion
evacuated environment
distribution line
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