Micron-Scale Differential Scanning Calorimeter on a Chip
A differential scanning microcalorimeter produced on a silicon chip enables microscopic scanning calorimetry measurements of small samples and thin films. The chip may be fabricated using standard CMOS processes. The microcalorimeter includes a reference zone and a sample zone. The reference and sample zones may be at opposite ends of a suspended platform or may reside on separate platforms. An integrated polysilicon heater provides heat to each zone. A thermopile consisting of a succession of thermocouple junctions generates a voltage representing the temperature difference between the reference and sample zones. Temperature differences between the zones provide information about the chemical reactions and phase transitions that occur in a sample placed in the sample zone.
- Research Organization:
- National Institute of Standards and Technology, Gaithersburg, MD (US)
- Sponsoring Organization:
- USDOE Office of Environmental Management (EM) (US)
- Assignee:
- DOEEMSP
- Patent Number(s):
- 6,079,873
- Application Number:
- R&D Project: EMSP 65421; 09/107,064; 107064; TRN: US200426%%27
- OSTI ID:
- 827540
- Resource Relation:
- Other Information: PBD: 30 Jun 1998
- Country of Publication:
- United States
- Language:
- English
Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K
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journal | April 1994 |
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