Self-consistent temperature compensation for resonant sensors with application to quartz bulk acoustic wave chemical sensors

Conference · Mon May 01 00:00:00 EDT 1995

OSTI ID:72977

Smith, J H ^[1]; Senturia, S D ^[2]

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1. Sandia National Labs., Albuquerque, NM (United States)
2. Massachusetts Inst. of Tech., Cambridge, MA (United States)

Since resonant sensors have a temperature sensitivity which is often greater than their sensitivity to the phenomena they are being used to detect, it is imperative to include either temperature control or temperature compensation in any resonant sensor system. The authors have developed a temperature-compensation scheme for resonant sensors which is amenable to integration into a resonator-driver integrated circuit. An integrated circuit incorporating this scheme has been designed, built, and tested.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 72977
• Report Number(s): SAND-95-0854C; CONF-950650-3; ON: DE95011882; TRN: AHC29519%%104
• Resource Relation: Conference: 8. international conference on solid-state sensors and actuators and 9th biannual international conference and annual European conference on solid-state sensors, Stockholm (Sweden), 25-29 Jun 1995; Other Information: PBD: [1995]
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
MONITORS
TEMPERATURE DEPENDENCE
COUNTING CIRCUITS
RESONATORS
MULTIPLEXERS
PERFORMANCE TESTING
MINIATURIZATION
INTEGRATED CIRCUITS
CHLORINATED ALIPHATIC HYDROCARBONS
SOLVENTS
CORRECTIONS