Integration of diffractive lenses with addressable vertical-cavity laser arrays
Conference
·
OSTI ID:57235
An optical interconnection system is being developed to provide vertical, digital data channels for stacked multichip modules. A key component of the system is an array of individually addressable vertical-cavity surface-emitting lasers with diffractive lenses integrated into the substrate to control beam divergence and direction. The lenses were fabricated by direct-write e-beam lithography and reactive ion beam etching into the GaAs substrate. Preliminary device performance data and the design and fabrication issues are discussed.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 57235
- Report Number(s):
- SAND-95-0360C; CONF-950226-38; ON: DE95009850; TRN: 95:004131
- Resource Relation:
- Conference: SPIE `95: SPIE conference on optics, electro-optics, and laser application in science, engineering and medicine, San Jose, CA (United States), 5-14 Feb 1995; Other Information: PBD: [1995]
- Country of Publication:
- United States
- Language:
- English
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