Scanning Photoelectron Microscope (SPEM) with a zone plate generated microprobe
- State Univ. of New York, Stony Brook, NY (USA). Dept. of Physics
We describe instrumentation of a scanning photoelectron microscope (SPEM), which we are presently developing and commissioning at the X1A beamline of the National Synchrotron Light Source (NSLS). This instrument is designed to use the Soft X-ray Undulator (SXU) at the NSLS as a high brightness source to illuminate a Fresnel zone plate, thus forming a finely focused probe, {le} 0.2{mu}m in size, on the specimen surface. A grating monochromator selects the photon energy in the 400-800 eV range with an energy resolution better than 1 eV. The expected flux in the focus is in the 5 {times} 10{sup 7} {minus} 10{sup 9} photons/s range. A single pass Cylindrical Mirror Analyzer (CMA) is used to record photoemission spectra, or to form an image within a fixed electron energy bandwidth as the specimen is mechanically scanned. As a first test, a 1000 mesh Au grid was successfully imaged with Au 4 f primary photoelectrons, achieving a resolution of about 1{mu}m. 10 refs., 5 figs., 1 tab.
- Research Organization:
- Brookhaven National Lab., Upton, NY (USA)
- Sponsoring Organization:
- DOE/ER; National Science Foundation (NSF)
- DOE Contract Number:
- AC02-76CH00016; AC03-76SF00098
- OSTI ID:
- 5480457
- Report Number(s):
- BNL-43339; CONF-890802-11; ON: DE90001552; TRN: 89-029407
- Resource Relation:
- Conference: 7. synchrotron radiation instrumentation (SRI) national conference, Berkeley, CA (USA), 6-10 Aug 1989
- Country of Publication:
- United States
- Language:
- English
Similar Records
Images of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source
Development of a second generation scanning photoemission microscope with a zone plate generated microprobe at the National Synchrotron Light Source
Related Subjects
43 PARTICLE ACCELERATORS
NSLS
SCANNING ELECTRON MICROSCOPY
ELECTRON MICROSCOPES
ENERGY RESOLUTION
PHOTOEMISSION
SOFT X RADIATION
SPECIFICATIONS
ACCELERATORS
CYCLIC ACCELERATORS
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPY
EMISSION
IONIZING RADIATIONS
MICROSCOPES
MICROSCOPY
RADIATION SOURCES
RADIATIONS
RESOLUTION
SECONDARY EMISSION
SYNCHROTRON RADIATION SOURCES
SYNCHROTRONS
X RADIATION
440300* - Miscellaneous Instruments- (-1989)
430303 - Particle Accelerators- Experimental Facilities & Equipment