Atomic structure of machined semiconducting chips: An x-ray absorption spectroscopy study
X-ray absorption spectroscopy (XAS) has been used to examine the atomic structure of chips of germanium that were produced by single point diamond machining. It is demonstrated that although the local (nearest neighbor) atomic structure is experimentally quite similar to that of single crystal specimens information from more distant atoms indicates the presence of considerable stress. An outline of the technique is given and the strength of XAS in studying the machining process is demonstrated.
- Research Organization:
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States); North Carolina State Univ., Raleigh, NC (United States)
- OSTI ID:
- 476642
- Report Number(s):
- LA-SUB-93-81; ON: DE97003578; TRN: 97:002288-0018
- Resource Relation:
- Other Information: PBD: Dec 1988; Related Information: Is Part Of Precision Engineering Center. 1988 Annual report, Volume VI; Dow, T. [ed.]; Fornaro, R.; Keltie, R.; Paesler, M. [and others]; PB: 367 p.
- Country of Publication:
- United States
- Language:
- English
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