A low power, tight seal, polyimide electrostatic microvalve
Conference
·
OSTI ID:385587
An electrostatically-actuated polyimide microvalve is developed with sub-micron gaps between the electrodes to provide high force with low power consumption (< 1 mW). Built-in residual stress results in a curled bimorph cantilever which allows for a n-Licroactuator with large displacement. This microactuator is used to open and close a fluid path hole etched in silicon for a microvalve. The microactuator can be actuated with 25V for a displacement of 200 {mu}m. The cantilever actuator is mainly composed of polyimide, which is flexible enough to conform over the flow hole, thereby eliminating the need for the design of a valve seat.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 385587
- Report Number(s):
- UCRL-JC-123423; CONF-961105-10; ON: DE96014046; TRN: 96:005841
- Resource Relation:
- Conference: 1996 international mechanical engineering congress and exhibition, Atlanta, GA (United States), 17-22 Nov 1996; Other Information: PBD: 17 Apr 1996
- Country of Publication:
- United States
- Language:
- English
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