Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features

Patent · Tue Apr 11 00:00:00 EDT 2023

OSTI ID:1998274

Yoo, Jae Hyuck; Feigenbaum, Eyal; Matthews, Manyalibo Joseph

An optical inspection system for detecting sub-micron features on a sample component. The system may have a controller, a camera responsive to the controller for capturing images, an objective lens able to capture submicron scale features on the sample component, and a pulsed light source. The pulsed light source may be used to generate light pulses. The camera may be controlled to acquire images, using the objective lens, only while the pulsed light source is providing light pulses illuminating a portion of the sample component. Relative movement between the sample component and the objective lens is provided to enable at least one of a desired subportion or an entirety of the sample component to be scanned with the camera.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC52-07NA27344
• Assignee: Lawrence Livermore National Security, LLC (Livermore, CA)
• Patent Number(s): 11,624,710
• Application Number: 16/421,710
• OSTI ID: 1998274
• Resource Relation: Patent File Date: 05/24/2019
• Country of Publication: United States
• Language: English